http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6257164-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-029 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2013-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2018-01-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2018-01-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-6257164-B2 |
| titleOfInvention | Method for forming resist pattern |
| priorityDate | 2013-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 225.