| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2225-06544
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-76891
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02164
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02271
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-265 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-481
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01T1-242
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14812
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-146
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1485
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14875
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14685
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L25-0657
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14687
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-144
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-148
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01T7-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-301
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-146 |
| filingDate |
2016-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2017-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-6251406-B2 |
| titleOfInvention |
Semiconductor device and manufacturing method thereof |
| priorityDate |
2015-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |