http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6245174-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F9-7088 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F9-7073 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-24 |
| filingDate | 2013-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2017-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-6245174-B2 |
| titleOfInvention | Substrate support apparatus and exposure apparatus |
| priorityDate | 2012-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 38.