http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6091940-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-318 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-42 |
| filingDate | 2013-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2017-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-6091940-B2 |
| titleOfInvention | Semiconductor device manufacturing method, substrate processing apparatus, and program |
| priorityDate | 2013-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 70.