| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32051
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45531
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28562
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28088 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285 |
| filingDate |
2015-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2017-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-6087023-B2 |
| titleOfInvention |
Semiconductor device manufacturing method, substrate processing apparatus, and recording medium |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110914970-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110914970-B |
| priorityDate |
2014-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |