Predicate |
Object |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J2203-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J2203-142 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J9-35 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-24 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
filingDate |
2013-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2017-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate |
2017-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
JP-6078631-B2 |
titleOfInvention |
Self-conditioning polishing pad and method for producing the same |
priorityDate |
2012-03-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |