| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K5-101
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K5-07 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D161-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D125-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D133-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D133-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D161-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D1-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2013-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2017-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-6059071-B2 |
| titleOfInvention |
Film formation method |
| priorityDate |
2013-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |