http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5956302-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C8-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50 |
| filingDate | 2012-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2016-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-5956302-B2 |
| titleOfInvention | Plasma processing apparatus and method for forming hetero film |
| priorityDate | 2012-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 36.