http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5948538-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-023 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G61-00 |
| filingDate | 2012-01-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2016-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-5948538-B2 |
| titleOfInvention | Method for manufacturing silicon wafer having insulating film |
| priorityDate | 2012-01-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 595.