http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5933308-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-77 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F12-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-73 |
| filingDate | 2012-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2016-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-5933308-B2 |
| titleOfInvention | Chemically amplified resist composition, resist film using the same, resist-coated mask blanks, resist pattern forming method, and electronic device manufacturing method |
| priorityDate | 2012-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 264.