| abstract |
The ceramic structure 10 has a built-in electrode 14 inside a disk-shaped ceramic base 12. The ceramic substrate 12 is a sintered body whose main component is alumina or a rare earth metal oxide, and has a thermal expansion coefficient of 7.5 to 9.5 ppm / K at 40 to 1200 ° C. The main component of the electrode 14 is metal ruthenium. The electrode 14 may be formed in a sheet shape, or may be patterned in a single stroke so as to spread over the entire surface. |