http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5924872-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-318 |
| filingDate | 2011-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2016-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-5924872-B2 |
| titleOfInvention | Method for forming insulating nitride layer by plasma generator and plasma generator |
| priorityDate | 2011-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556970 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419579069 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID947 |
Total number of triples: 14.