http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5920491-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L101-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L83-04 |
| filingDate | 2015-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2016-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-5920491-B2 |
| titleOfInvention | Radiation-sensitive resin composition for immersion exposure and method for forming cured pattern |
| priorityDate | 2015-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 1112.