http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5905447-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K1-165 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K1-165 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-507 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-321 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01Q1-38 |
| filingDate | 2011-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2016-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-5905447-B2 |
| titleOfInvention | Induction coil assembly in a plasma processing system |
| priorityDate | 2010-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.