http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5865617-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-515 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-26 |
| filingDate | 2011-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2016-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-5865617-B2 |
| titleOfInvention | Plasma generation method and apparatus therefor |
| priorityDate | 2010-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.