| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C323-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D303-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y30-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C323-41
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-185
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C323-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G65-334
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D171-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G65-007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F2-38 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C26-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2009-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2016-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-5864259-B2 |
| titleOfInvention |
Pattern formation method |
| priorityDate |
2008-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |