patent/JP-5721600-B2

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classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
filingDate	2011-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate	2015-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate	2015-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	JP-5721600-B2
titleOfInvention	Gap filling composition, gap filling method using the same, and semiconductor device manufacturing method
priorityDate	2010-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Predicate	Subject
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Total number of triples: 28.