Predicate |
Object |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B2305-026 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3244 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3217 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-5445 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3225 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B2457-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-963 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-5409 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B2250-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-786 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-662 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-661 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-6582 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3206 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-343 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-062 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-775 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-6025 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-52 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B37-005 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B18-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-115 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1203 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-634 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-187 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2007 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-115 |
filingDate |
2014-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2015-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate |
2015-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
JP-5697813-B1 |
titleOfInvention |
Handle substrate for composite substrates for semiconductors |
abstract |
The handle substrate 1 is made of a translucent ceramic. The average density of pores having a size of 0.5 to 3.0 μm included in the surface region 2A on the bonding surface 1a side of the handle substrate 1 is 50 / mm 2 or less. A region 3 in which the average density of pores having a size of 0.5 to 3.0 μm is 100 / mm 2 or more is formed in the handle substrate 1. The average particle diameter of the translucent ceramic is 5 to 60 μm. |
priorityDate |
2013-07-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |