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filingDate 2014-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2015-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2015-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-5697813-B1
titleOfInvention Handle substrate for composite substrates for semiconductors
abstract The handle substrate 1 is made of a translucent ceramic. The average density of pores having a size of 0.5 to 3.0 μm included in the surface region 2A on the bonding surface 1a side of the handle substrate 1 is 50 / mm 2 or less. A region 3 in which the average density of pores having a size of 0.5 to 3.0 μm is 100 / mm 2 or more is formed in the handle substrate 1. The average particle diameter of the translucent ceramic is 5 to 60 μm.
priorityDate 2013-07-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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Total number of triples: 47.