http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5693175-B2
Outgoing Links
Predicate | Object |
---|---|
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-35 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 |
filingDate | 2010-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2015-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2015-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-5693175-B2 |
titleOfInvention | Sputtering method |
priorityDate | 2010-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Predicate | Subject |
---|---|
isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23968 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458357694 |
Total number of triples: 13.