| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31855
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B26F2001-4427
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24843
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B26F2001-4418 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F222-1063
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F222-102
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B26F1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B1-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B13-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F222-1006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L33-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F9-7057 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B13-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2010-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2015-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-5669841-B2 |
| titleOfInvention |
Detection apparatus and method, and lithography system |
| priorityDate |
2009-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |