http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5664319-B2
Outgoing Links
Predicate | Object |
---|---|
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
filingDate | 2011-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2015-02-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2015-02-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-5664319-B2 |
titleOfInvention | Fluorine-containing lactone monomer compound, fluorine-containing lactone polymer compound, resist solution thereof, and pattern forming method using the same |
priorityDate | 2010-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 225.