http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5659425-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32422 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3447 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32357 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H3-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 |
| filingDate | 2008-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2015-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2015-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-5659425-B2 |
| titleOfInvention | Processing system and neutral beam source for generating negative ion plasma |
| priorityDate | 2007-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 16.