| Predicate |
Object |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-52 |
| filingDate |
2010-04-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2015-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-5649322-B2 |
| titleOfInvention |
Semiconductor device and manufacturing method of semiconductor device |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113035865-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11217688-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113035865-A |
| priorityDate |
2010-04-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |