http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5613410-B2
Outgoing Links
Predicate | Object |
---|---|
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 |
filingDate | 2009-12-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2014-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2014-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-5613410-B2 |
titleOfInvention | Pattern forming method, pattern, chemically amplified resist composition, and resist film |
priorityDate | 2009-12-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 263.