| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-107
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-0896 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-107
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-04 |
| filingDate |
2010-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2014-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-5593129-B2 |
| titleOfInvention |
Deposition of silicon-containing layers with silicon compounds |
| priorityDate |
2002-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |