http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5586906-B2
Outgoing Links
Predicate | Object |
---|---|
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66772 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1266 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76254 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1214 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
filingDate | 2009-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2014-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2014-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-5586906-B2 |
titleOfInvention | Method for manufacturing semiconductor device |
priorityDate | 2008-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 36.