http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5583716-B2
Outgoing Links
Predicate | Object |
---|---|
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-95615 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-956 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-4788 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03B27-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-24 |
filingDate | 2012-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2014-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2014-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-5583716-B2 |
titleOfInvention | Method and apparatus for changing optical properties of resist |
priorityDate | 2006-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 155.