http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5534205-B2
Outgoing Links
Predicate | Object |
---|---|
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-095 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 |
filingDate | 2010-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2014-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2014-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-5534205-B2 |
titleOfInvention | Photosensitive resist underlayer film forming composition and resist pattern forming method |
priorityDate | 2010-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 143.