| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G2101-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G2110-0025 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G18-4854
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G18-797
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G18-4277
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G18-2835
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G18-30 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G101-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G18-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-24 |
| filingDate |
2010-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2014-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-5528169-B2 |
| titleOfInvention |
Polishing pad, method for manufacturing the same, and method for manufacturing a semiconductor device |
| priorityDate |
2010-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |