| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4404
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C28-042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-11 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C4-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C4-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C4-18 |
| filingDate |
2008-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2014-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-5506678-B2 |
| titleOfInvention |
Method for coating semiconductor processing equipment with protective film containing yttrium |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013063904-A |
| priorityDate |
2007-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |