Predicate |
Object |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6719 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67051 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0021 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02101 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B13-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67028 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67034 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
filingDate |
2010-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2014-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate |
2014-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
JP-5506461-B2 |
titleOfInvention |
Supercritical processing apparatus and supercritical processing method |
priorityDate |
2010-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |