http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5466526-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-314 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-318 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-28 |
| filingDate | 2010-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2014-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-5466526-B2 |
| titleOfInvention | Semiconductor device manufacturing method, substrate processing apparatus, and program |
| priorityDate | 2010-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.