http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5461239-B2

Outgoing Links

Predicate Object
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-16225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-32225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-73204
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-15311
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L25-07
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L25-065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L25-18
filingDate 2010-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2014-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2014-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-5461239-B2
titleOfInvention Semiconductor device manufacturing method, semiconductor device, electronic component manufacturing method, and electronic component
priorityDate 2010-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID424631930
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12736
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3016472
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419537854
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419486887
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID74574
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452112587
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10290728
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID69591
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID86638032
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10458
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87106880
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420234864
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414878744
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419697486
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12749
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419584148
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID168343
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11138
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID430818878
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10687
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419484375
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID250594
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415780201
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID74971
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7393
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415745782
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15617
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123565437
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414871446
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6966
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21225557
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66637
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419522095
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524915
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID406907632
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID105034
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID854386
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450690641
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421922098
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID428411459
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415734653
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419540653
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414862845
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419475434
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415903384
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID424657222
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID73864
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID423341427
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID49853476
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419490744
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID83699
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID335
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458394586
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422913659
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6643
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419547110
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419483737
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18935104
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13185
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419547026
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415272677
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452394057
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID75502
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411653627
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11138182
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12101
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID168407
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452373511
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419587206
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12989
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3015939
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7958
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419566947
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5352426
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452599253
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID107205
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419510716
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419584836
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7948
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419641868
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419640733
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID409681990
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6847
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7947
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414874875
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415756990
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415777387
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426172338
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID71435541
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID160824
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID427815970
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID70012
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419509620
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15816
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID671
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID90068
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID67174
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID85582
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420663812
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419519871
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426195053
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID90326
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID85689
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15730
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415811623
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18934410
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415788457
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416218223
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11335
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7771
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1491
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414877992
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19352763
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419574217
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19761990
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415787972
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID67172707
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412228592
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15202944
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID370
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407297464
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2775094
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID160656559
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID70095
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414860340
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419861921
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12572015
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID70262
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10423
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426453095
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412798128
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414867020
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416095767
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419554492
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419517913
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415755484
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410667519
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415734187
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66494
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419576717
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20190727
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415754414
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3015276
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6997
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7103
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415777653
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419511196
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8373
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8054
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12391
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6455998
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12726601
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411222974
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6455999
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID83648
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415744893
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421613954
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID427831872
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7267
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452239031
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2879
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426242162
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID75498
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419508852
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID67367569
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9338
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419490819
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448064947
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419566589
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID72
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407744272
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414172096
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID566830
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14106
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3469
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421185142
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414972214
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID424617106
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62696

Total number of triples: 196.