http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5453271-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-463 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-511 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-463 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-509 |
| filingDate | 2008-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2014-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-5453271-B2 |
| titleOfInvention | Apparatus and method for ultra-high frequency plasma assisted CVD under atmospheric pressure and its application |
| priorityDate | 2007-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 36.