http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5431675-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-005 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-008 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-003 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05G2-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2006-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2014-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-5431675-B2 |
| titleOfInvention | Laser-generated plasma EUV light source with pre-pulse |
| priorityDate | 2005-02-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 16.