http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5403201-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G09F9-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1345 |
| filingDate | 2007-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2014-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-5403201-B2 |
| titleOfInvention | Manufacturing method of semiconductor device |
| priorityDate | 2007-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 15.