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filingDate 2008-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2013-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2013-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-5363478-B2
titleOfInvention Method and apparatus for generating group IV nanoparticles in a flow-through plasma reactor
abstract The present invention provides a radiofrequency plasma apparatus for the production of nanoparticles and method for producing nanoparticles using the apparatus. The apparatus is designed to provide high throughput and makes the continuous production of bulk quantities of high-quality crystalline nanoparticles possible. The electrode assembly of the plasma apparatus includes an outer electrode and a central electrode arranged in a concentric relationship to define an annular flow channel between the electrodes.
priorityDate 2007-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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