http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5359165-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B15-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-207 |
| filingDate | 2008-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2013-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-5359165-B2 |
| titleOfInvention | Nondestructive warpage measuring method and measuring apparatus for single crystal substrate |
| abstract | <P>PROBLEM TO BE SOLVED: To measure warpage of a single-crystal substrate in a component sealed with a package material by diffracted X-rays through the package material without destroying the component. <P>SOLUTION: When the Bragg condition is satisfied when the rotation angle ω of a sample stage 6 measured from a wave number vector 8 of incident X rays 4 is changed with an X-ray detector 1 fixed, that is, when the angle α formed by the surface of a radiation area of an Si chip in a sample 30 and the wave number vector 8 of the incident X rays 4 is a specific value, crystal diffraction of X-rays occurs and the X-ray detector 1 detects diffracted X rays 9. The sample 30 has a structure in which the Si chip is mounted on a printed board and these are sealed with a mold. The X-ray detector 1 detects the diffracted X rays 9 through the mold and can acquire a rocking curve. Warpage of the Si chip can be measured based on the rocking curve. <P>COPYRIGHT: (C)2010,JPO&INPIT |
| priorityDate | 2008-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.