http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5341944-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-76 |
| filingDate | 2011-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2013-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-5341944-B2 |
| titleOfInvention | Method of forming insulating film for trench filling using polysiloxane condensation reaction product |
| abstract | <P>PROBLEM TO BE SOLVED: To provide a solution of a condensation reaction product which: is particularly suitable for filling up trench that is formed in a substrate and has a narrow opening and a high aspect ratio; has a long pot life; has good trench filling property; has a small curing shrinkage when burned and converted to a silicon oxide; and is excellent in crack resistance and HF resistance. <P>SOLUTION: The solution of a condensation reaction product comprises (I) the condensation reaction product and (II) a solvent, wherein the condensation reaction product is obtained by the condensation reaction of a condensation ingredient that contains at least (i) a polysiloxane compound of 40 mass% or more and 99 mass% or less in terms of condensation weight and (ii) a silica particle of 1 mass% or more and 60 mass% or less; and the polysiloxane compound is derived from silane compounds represented by formula (1): R<SP>1</SP><SB>n</SB>SiX<SP>1</SP><SB>4-n</SB>which are two or more kinds of silane compounds containing at least a four-functional silane compound and a three-functional silane compound. <P>COPYRIGHT: (C)2011,JPO&INPIT |
| priorityDate | 2009-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 148.