http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5339028-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C303-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C307-02 |
| filingDate | 2008-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2013-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-5339028-B2 |
| titleOfInvention | Benzyl cyanide compound, photoacid generator and method for producing the same |
| abstract | <P>PROBLEM TO BE SOLVED: To provide a new compound producing a resist achieving high sensitivity and high transparency in the case of using it as a photoacid generator in a resist composition. <P>SOLUTION: This aryl-substituted benzyl cyanide-based oximesulfonate compound is expressed by formula [1] [wherein, R<SP>1</SP>is a substituted or a non-substituted aryl; R<SP>2</SP>is H, a halogen atom, CN, NO<SB>2</SB>, a 1-10C alkyl or alkoxy, or a 1-5C haloalkyl or haloalkoxy; R<SP>3</SP>is a 1-10C alkyl or alkoxy, a 1-5C haloalkyl or haloalkoxy, or phenyl, naphthyl or anthranyl, which may be substituted by W; and the W is a halogen atom, CN, NO<SB>2</SB>, a 1-10C alkyl or alkoxy, or a 1-5C haloalkyl or haloalkoxy]. <P>COPYRIGHT: (C)2009,JPO&INPIT |
| priorityDate | 2008-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 97.