http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5293010-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-125 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01C19-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-84 |
| filingDate | 2008-09-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2013-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-5293010-B2 |
| titleOfInvention | Mechanical quantity sensor and laminate manufacturing method |
| abstract | <P>PROBLEM TO BE SOLVED: To provide a mechanical quantity sensor for reducing a residue of a resist when an electrode is formed, and a method for manufacturing a laminated body. <P>SOLUTION: The method for manufacturing the laminated body includes: a step for sequentially forming first, second and third conductor layers containing metal on a substrate; a step for patterning the third conductor layer; a step for patterning the second conductor layer by using the third patterned conductor layer as a mask; a step for patterning the first conductor layer by using the second patterned conductor layer as a mask; and a step for removing the third patterned conductor layer. <P>COPYRIGHT: (C)2010,JPO&INPIT |
| priorityDate | 2008-09-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.