| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P2015-084
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2207-092
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-0307
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P2015-082 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01C19-5719
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P15-0802
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P15-125
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P15-18 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-18 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-125
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-84 |
| filingDate |
2009-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2013-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2013-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-5222947-B2 |
| titleOfInvention |
MEMS sensor |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014500498-A |
| priorityDate |
2008-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |