http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5184302-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 |
| filingDate | 2008-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-04-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2013-04-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-5184302-B2 |
| titleOfInvention | Susceptor device, epitaxial wafer manufacturing apparatus, and epitaxial wafer manufacturing method |
| priorityDate | 2008-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6327210 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426098976 |
Total number of triples: 12.