http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5178527-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-88 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-956 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 2006-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-04-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2013-04-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-5178527-B2 |
| titleOfInvention | System and method for inspecting wafers with improved sensitivity |
| priorityDate | 2005-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.