| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-856
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-857
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-3174
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31732
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-89
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-888
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-891
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-5873
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02238
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31662
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30604
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0332
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3185
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-06 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K15-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B31-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C99-00 |
| filingDate |
2005-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2013-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2013-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-5152751-B2 |
| titleOfInvention |
Patterning of solid condensate gas layers by energy-induced local removal and solid state chemical reactions occurring in such layers |
| priorityDate |
2004-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |