http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5055114-B2
Outgoing Links
Predicate | Object |
---|---|
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-3342 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2236 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32834 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32412 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265 |
filingDate | 2006-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2012-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2012-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-5055114-B2 |
titleOfInvention | Plasma doping method |
priorityDate | 2005-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.