| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-0709
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-0108
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-074 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-182
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-207 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-18 |
| filingDate |
2007-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2012-10-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2012-10-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-5041214-B2 |
| titleOfInvention |
Method for forming metal thin film and method for manufacturing electronic device |
| priorityDate |
2007-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |