http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5037442-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
| filingDate | 2008-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2012-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2012-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-5037442-B2 |
| titleOfInvention | Titanium nitride removing liquid, method for removing titanium nitride film, and method for producing titanium nitride removing liquid |
| abstract | <P>PROBLEM TO BE SOLVED: To provide a titanium nitride-removing liquid and the like by which a titanium nitride coating film formed on a semiconductor multilayer laminate is removed without corroding a layer used for wiring and formed of copper or a layer of an insulating film formed of a high-dielectric-constant material and a low-dielectric-constant material with respect to the semiconductor multilayer laminate. <P>SOLUTION: The titanium nitride-removing liquid to be used contains 10 to 40 mass% of hydrogen peroxide and tetraalkyl ammonium hydroxide, and is controlled so that pH at 25°C is 6.0 to 8.2. <P>COPYRIGHT: (C)2010,JPO&INPIT |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11390805-B2 |
| priorityDate | 2008-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 41.