http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5029870-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate | 2006-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2012-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2012-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-5029870-B2 |
| titleOfInvention | Exposure method and apparatus, immersion member, exposure apparatus maintenance method, and device manufacturing method |
| priorityDate | 2006-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 17.