http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4986661-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522 |
| filingDate | 2007-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2012-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2012-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-4986661-B2 |
| titleOfInvention | Insulating film forming method and semiconductor device using the same |
| priorityDate | 2007-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.